The M600 MBE tool is a UHV evaporation system in the research group of Prof. Igor V. Shvets.
It is designed specifically for high quality deposition or epitaxial growth of metals, oxides, superlattices, and heterojunctions. Ports are reserved for more accurate flux control using either a cross beam quadrupole mass spectrometer or atomic absorption spectroscopy. The deposition chamber is fitted with a reflection high energy electron diffraction (RHEED) system for in situ sample analysis. The MBE system is also fitted with an Oxford Scientific OSPrey Plasma Source set to operate in Atomic Mode.
Contact: Prof Igor Shvets, email ivchvets AT tcd.ie